High-speed self-aligned InP/GaInAs double heterostructure bipolar transistor with high current-driving capability

Abstract
A fully self-aligned InP/GaInAs double heterostructure transistor has been fabricated using a substitutional emitter process. The small-signal current gain was typically 10–30 with a fT of 27 GHz. The maximum fT = 27 GHz occurred at current densities of 7 × 104 A cm−2, and the associated fmax was 20 GHz, the highest value obtained for InP-based bipolar transistors to date.

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