Degradation of polymers subjected to radio-frequency discharges in SF6

• 1 July 1979
• journal article
• research article
• Published by Wiley in Journal of Applied Polymer Science
• Vol. 24  (1) , 125-133
• https://doi.org/10.1002/app.1979.070240111

Abstract

Keywords

• POLYMERS
• SOF2
• CF3
• FREQUENCY
• MEMBERS
• RADIO
• DEGRADATION
• MODEL
• SF6
• DISCHARGE