Transport and heating of small particles in high density plasma sources

• 1 January 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (1) , 486-493
• https://doi.org/10.1116/1.587103

Abstract

Keywords

• TRANSPORT AND HEATING
• PLASMA SOURCES
• DENSITY PLASMA
• SMALL PARTICLES