Efficient and Sensitive Capacitive Readout of Nanomechanical Resonator Arrays

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Abstract
Here we describe all-electronic broadband motion detection in radio frequency nanomechanical resonators. Our technique relies upon the measurement of small motional capacitance changes using an LC impedance transformation network. We first demonstrate the technique on a single doubly clamped beam resonator with a side gate over a wide range of temperatures from 20 mK to 300 K. We then apply the technique to accomplish multiplexed readout of an array of individually addressable resonators, all embedded in a single high-frequency circuit. This technique may find use in a variety of applications ranging from ultrasensitive mass and force sensing to quantum information processing.