Step height measurement using a scanning tunneling microscope equipped with a crystalline lattice reference and interferometer
- 1 May 1995
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 13 (3) , 1112-1114
- https://doi.org/10.1116/1.587912
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: