Electronic Ultra-High Vacuum Pump
- 1 May 1958
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 29 (5) , 367-370
- https://doi.org/10.1063/1.1716198
Abstract
An ultra‐high vacuum pump has been developed based on the combined effects of ionization, excitation and sputtering. A cold‐cathode discharge in magnetic field is employed with no hot filaments nor moving parts. The ultimate vacuum attainable is not yet known but is probably below 2×10−10 mm Hg. A pumping speed of about 10 liters/sec for air has been recorded at 1×10−7 mm Hg. The pump replaces liquid nitrogen‐trapped oil diffusion pumps for pumping microwave tubes.Keywords
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