The effect of water on friction of MEMS

• 1 January 1999
• journal article
• Published by Springer Nature in Tribology Letters
• Vol. 6  (3/4) , 215-220
• https://doi.org/10.1023/a:1019119925494

Abstract

Keywords

• HYDROPHOBIC
• HYDROPHILIC
• ADHESIVE
• MEMS
• HUMIDITY
• FUNCTION
• THICKNESS
• COVERAGE
• FRICTION FORCE