High frequency transmission line using micromachinedpolymer dielectric

11 June 1998

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 34 (12) , 1237-1238
https://doi.org/10.1049/el:19980872

Abstract

A micromachined transmission line for microwave and millimetre-wave applications has been fabricated and characterised in the 20–40 GHz range. Using this topology, the direct integration of both mesa and discrete devices is possible making the line suitable for MIC and MMIC applications. This structure can also be used as an alternative to pre-formed substrates for millimetre-wave MIC circuits.

Keywords

HIGH FREQUENCY TRANSMISSION LINE
MICROMACHINED POLYMER DIELECTRIC
MESA DEVICE
MILLIMETRE-WAVE CIRCUIT
MMIC
20 TO 40 GHZ
DISCRETE DEVICE
MICROWAVE CIRCUIT
MIC

This publication has 1 reference indexed in Scilit:

SU-8: a low-cost negative resist for MEMS
Journal of Micromechanics and Microengineering, 1997