Acid-diffusion suppression in chemical amplification resists by controlling acid-diffusion channels in base matrix polymers
- 1 November 1996
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 14 (6) , 4216-4220
- https://doi.org/10.1116/1.588578
Abstract
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