Shifts of dilute Pt impurities in amorphous Si by ion irradiation
- 15 May 1983
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 209-210, 173-177
- https://doi.org/10.1016/0167-5087(83)90796-2
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Impurity profile broadening and shifts by ion beam mixingJournal of Applied Physics, 1982
- Ion beam mixing in amorphous silicon I. Experimental investigationNuclear Instruments and Methods, 1981
- Theoretical aspects of atomic mixing by ion beamsNuclear Instruments and Methods, 1981
- Distortion of depth profiles during ion bombardment II. Mixing mechanismsNuclear Instruments and Methods, 1981