Si-H VIBRATIONAL PROPERTIES IN CRYSTALLIZED HYDROGENATED SILICON FABRICATED BY REACTIVE SPUTTERING IN H2ATMOSPHERE
- 1 October 1981
- journal article
- Published by EDP Sciences in Le Journal de Physique Colloques
- Vol. 42 (C4) , C4-277
- https://doi.org/10.1051/jphyscol:1981459
Abstract
Crystallized hydrogenated silicon (c-Si:H) films are fabricated by rf-sputtering in pure H2 atmosphere. Their sharp and fine structured infrared spectra have enabled us to assign accurately the vibrational configurations between Si and H. The results are applicable to the amorphous hydrogenated silicon (a-Si : H) where the Si-H vibrational configurations are not yet well understoodKeywords
This publication has 0 references indexed in Scilit: