Monolithic Ga1−xInxAs mesa lasers with grown optical facets

Abstract
Optically pumped laser oscillation at 77 K has been observed in vapor‐grown epitaxial Ga1−xInxAs (0⩽x⩽0.1) mesa structures which have vertical as‐grown crystalline facets furnishing the optical feedback. Several hundred mesas were grown on a single slice using photolithography and selective vapor‐phase epitaxy. The best mesas are flat to within a few hundred angstroms and the edges are very sharp and well defined. Details concerning the growth, morphology, and emission characteristics of the mesa lasers are given.