Synthesis of Titanium Nitride by Enhanced ARE Process

• 1 March 1978
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 17  (3) , 575-576
• https://doi.org/10.1143/jjap.17.575

Abstract

Keywords

• NITRIDE BY ENHANCED
• ENHANCED ARE PROCESS
• SYNTHESIS OF TITANIUM NITRIDE