Xtem of Silicon Vlsic Device Structures

• 1 January 1987
• journal article
• Published by Springer Nature in MRS Proceedings
• Vol. 115
• https://doi.org/10.1557/proc-115-275

Abstract

Keywords

• SAMPLE PREPARATION
• XTEM
• STRUCTURES
• DEVICES
• QUALITY
• TURNAROUND TIME
• TECHNIQUES FOR PREPARING