Feature‐Size Dependence of Etch Rate in Reactive Ion Etching

• 1 August 1991
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 138  (8) , 2439-2445
• https://doi.org/10.1149/1.2085991

Abstract

Keywords

• REACTIVE ION ETCHING