Integrated optic pressure sensor on silicon substrate
- 1 December 1989
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 28 (23) , 5153-5157
- https://doi.org/10.1364/ao.28.005153
Abstract
A novel integrated optic pressure sensor was constructed with the Mach-Zehnder interferometer structure of glass waveguides on a silicon substrate. Pressure is sensed by detecting the deformation of a thin diaphragm fabricated by using the anisotropic etching of a silicon substrate. The basic design concept of the present sensor was provided by analyzing its operation. The measurable pressure range and the sensitivity can be set by the proper selection of the diaphragm structure. A device was built and its operation performances were tested at 633 nm. For the fabricated device, the measured halfwave pressure was 0.8 × 105 Pa and the extinction ratio was 10 dB.Keywords
This publication has 7 references indexed in Scilit:
- Integrated-optic fluid sensor using heat transferApplied Optics, 1988
- An integrated-optic disk pickup deviceJournal of Lightwave Technology, 1986
- Low-loss high-silica single-mode channel waveguidesElectronics Letters, 1986
- Optical-waveguide microdisplacement sensorElectronics Letters, 1982
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- Fabrication of novel three-dimensional microstructures by the anisotropic etching ofIEEE Transactions on Electron Devices, 1978
- Coupled mode analysis of light modulation in dielectric waveguidesApplied Physics A, 1975