Monolithic two-dimensional arrays of micromachined microstructures for infrared applications
- 1 January 1998
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Proceedings of the IEEE
- Vol. 86 (8) , 1679-1686
- https://doi.org/10.1109/5.704273
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Recent progress in large dynamic resistor arraysPublished by SPIE-Intl Soc Optical Eng ,1997
- Chapter 3 Monolithic Silicon Microbolometer ArraysPublished by Elsevier ,1997
- High-temperature superconducting microbolometerApplied Physics Letters, 1990