Historical overview of SIMOX
- 1 January 1991
- Vol. 42 (5-6) , 333-340
- https://doi.org/10.1016/0042-207x(91)90050-s
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Total-dose effects of gamma-ray irradiation on CMOS/SIMOX devicesIEEE Circuits and Devices Magazine, 1987
- Promotion of practical SIMOX technology by the development of a 100 mA-class high-current oxygen implanterElectronics Letters, 1986
- Subscriber line interface circuit LSI fabricated using high-voltage CMOS/SIMOX technologyElectronics Letters, 1983
- Electric-field-shielding layers formed by oxygen implantation into siliconElectronics Letters, 1983
- C.M.O.S. devices fabricated on buried SiO 2 layers formed by oxygen implantation into siliconElectronics Letters, 1978
- Formation of SiO2 Films by Oxygen-Ion BombardmentJapanese Journal of Applied Physics, 1966