Synchrotron Radiation for Measurement of Contaminants on Silicon Surfaces

1 January 1993

journal article
Published by Springer Nature in MRS Proceedings

Vol. 307
https://doi.org/10.1557/proc-307-125

Abstract

The detection limit for aluminum using total reflection x-ray fluorescence (TXRF) is approximately 100 times lower for a synchrotron source compared to a conventional source. The detection limit for transition metals is approximately 15 to 40 times lower depending on atomic number and energy of the incident radiation.

Keywords

CONTAMINANTS
SYNCHROTRON
TXRF
TRANSITION
ALUMINUM
FLUORESCENCE
SILICON
ATOMIC
RADIATION
TIMES LOWER

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