Rate and pressure dependence of contaminants in vacuum-deposited aluminum films

• 1 March 1978
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 15  (2) , 210-214
• https://doi.org/10.1116/1.569481

Abstract

Keywords

• PRESSURE DEPENDENCE
• DEPOSITED ALUMINUM FILMS
• CONTAMINANTS IN VACUUM
• DEPENDENCE OF CONTAMINANTS