Structural Modification of a Trench by Hydrogen Annealing

• 1 December 2000
• journal article
• Published by Korean Physical Society in Journal of the Korean Physical Society
• Vol. 37  (6)
• https://doi.org/10.3938/jkps.37.1034

Abstract

Keywords

• STRUCTURAL MODIFICATION
• MODIFICATION OF A TRENCH
• TRENCH BY HYDROGEN ANNEALING