Thin-film machining by laser-induced explosion
- 1 November 1977
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 31 (9) , 615-617
- https://doi.org/10.1063/1.89801
Abstract
This paper describes a process for the laser machining of thin metallic films on dielectric substrates. The observation of a distinct minimum in the machining threshold and the fact that no substrate damage occurs over a wide range of incident power are explained based on an explosive film‐removal mechanism. Experimental results supporting the predictions are presented.Keywords
This publication has 2 references indexed in Scilit:
- Thermal analysis of thin-film micromachining with lasersJournal of Applied Physics, 1973
- Reflection and Transmission Interference Filters Part I TheoryJournal of the Optical Society of America, 1947