Galvanoplated 3D structures for micro systems
- 31 January 1994
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 23 (1-4) , 455-459
- https://doi.org/10.1016/0167-9317(94)90194-5
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Fabrication of magnetic microstructures by using thick layer resistsMicroelectronic Engineering, 1993