X-ray imaging during plasma-source ion implantation
- 1 March 1996
- journal article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 16 (1) , 141-152
- https://doi.org/10.1007/bf01465221
Abstract
No abstract availableKeywords
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- Numerical simulation of plasma sheath expansion, with applications to plasma-source ion implantationJournal of Applied Physics, 1992
- Model of plasma source ion implantation in planar, cylindrical, and spherical geometriesJournal of Applied Physics, 1990
- A study of the improved wear performance of nitrogen-implanted Ti-6Al-4VWear, 1983