A low-loss 20 GHz micromachined bandpass filter
- 19 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 1531-1534 vol.3
- https://doi.org/10.1109/mwsym.1995.406266
Abstract
We report on the results of a state-of-the-art planar interdigitated bandpass filter at K-band by using micromachining techniques. In this design, a microwave model was first built at 850 MHz to simulate the K-band filter, and the 20 GHz micromachined filter was fabricated based on the 850 MHz microwave model. Excellent agreement has been achieved between the microwave model and the 20 GHz filter. The micromachined filter exhibits a return loss better than -15 dB within the passband and a 1.7 dB port-to-port insertion loss at 20.3 GHz. A grounded coplanar waveguide with a micromachined mouse-hole shielding structure has also been carefully examined. The grounded coplanar waveguide structure is used in the micromachined filter as the input/output feeding line and exhibits a return loss better than -20 dB up to 32 GHz.Keywords
This publication has 5 references indexed in Scilit:
- Planar microwave and millimeter-wave lumped elements and coupled-line filters using micro-machining techniquesIEEE Transactions on Microwave Theory and Techniques, 1995
- Novel Low-Loss Interdigitated Filters for Microwave and Millimeter-Wave Applications Using Micromachining TechniquesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1994
- Micromachined circuits for millimeter- and sub-millimeter-wave applicationsIEEE Antennas and Propagation Magazine, 1993
- Hairpin-Line and Hybrid Hairpin-Line/Half-Wave Parallel-Coupled-Line FiltersIEEE Transactions on Microwave Theory and Techniques, 1972
- Interdigital Band-Pass FiltersIRE Transactions on Microwave Theory and Techniques, 1962