Profiling of carbon, oxygen and argon contamination in sputter-deposited films using nuclear backscattering and nuclear reaction spectroscopy
- 1 January 1991
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 48-49, 215-221
- https://doi.org/10.1016/0169-4332(91)90333-f
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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