NIST–IMGC comparison of gas flows below one litre per minute

Abstract
We compared the IMGC and NIST standards for small gas flows at the IMGC. The IMGC standard is a recently developed primary flow meter that extracts a large piston out of a temperature-controlled chamber. Controlling the piston's speed holds the pressure in the chamber constant. The NIST standard is a recently developed transfer standard that was calibrated against two primary standards at NIST. The first NIST primary extracts a large piston out of an oil-filled chamber in which a metal bellows is suspended. Controlling the piston's speed holds the pressure in the bellows constant. The second NIST primary is a static gravimetry method. The results include 49 nitrogen flow rates from 0.22 µmol s−1 to 770 µmol s−1 (1 µmol s−1 = 1.3448 cm3 min−1 of an ideal gas at the 'standard' conditions of 0 ûC and 101 325 Pa). For all but one of the comparisons, the agreement between IMGC and NIST is better than 0.06%.

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