High resolution 50 nm linear displacement macroscale meander-line PZT actuator

2 September 1993

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 29 (18) , 1606-1608
https://doi.org/10.1049/el:19931070

Abstract

A high resolution < 50 nm piezoelectric meander-line actuator is experimentally demonstrated using a macroscale model made of 22 bars of PZT. The high resolution displacement measurements are taken using a Michelson optical interferometer. Linear, stable, displacement behaviour with no hysteresis is demonstrated for low (< 100 V) applied voltages.

Keywords

MEANDER-LINE PZT ACTUATOR
MICHELSON OPTICAL INTERFEROMETER
PIEZOELECTRIC MEANDER-LINE ACTUATOR
50 NM
HIGH RESOLUTION
PBZRO3TIO3
LOW VOLTAGE
PZT
100 V

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