Electron beam probing system with ultrahigh time resolution

Abstract
We have developed an electron beam (EB) probing system with an ultrahigh time resolution of 10 ps. To achieve this, the distortion of the rise/fall time of the observed waveform must be less than 10 ps and the resolution of the time scale must be 10 ps. In the newly developed system, the distortion is less than 10 ps for rise/fall times of more than 100 ps. This was achieved by using trough-type traveling-wave deflectors and low jitter circuits for EB pulse generation. The 10 ps time scale resolution was achieved by using an EB pulse phase shifter with electrical correction. The EB probing system can be applied to the internal diagnosis of very high speed ICs, such as GaAs ICs.

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