A computationally practical approach to simulating complex surface-micromachined structures with fabrication non-idealities
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A low cost monolithic accelerometer; product/technology updatePublished by Institute of Electrical and Electronics Engineers (IEEE) ,1992
- FastCap: a multipole accelerated 3-D capacitance extraction programIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1991