Finite metal-sheet-resistance in contact resistivity measurements: Application to Si/TiN contacts

This publication has 6 references indexed in Scilit:

• Electron tunneling and contact resistance of metal-silicon contact barriers
  Published by Elsevier ,2002
• The effects of contact size and non-zero metal resistance on the determination of specific contact resistance
  Solid-State Electronics, 1982
• Thermal stability of titanium nitride for shallow junction solar cell contacts
  Journal of Applied Physics, 1981
• TiN and TaN as diffusion barriers in metallizations to silicon semiconductor devices
  Applied Physics Letters, 1980
• Aluminum-silicon ohmic contact on “shallow” junctions
  Solid-State Electronics, 1980
• Models for contacts to planar devices
  Solid-State Electronics, 1972