Optimum germanium profile for SiGe base HBTs

Abstract
The thermal stability of an SiGe base HBT is closely related to the integrated Ge content in the base. It is therefore appropriate to consider what form the Ge profile should take to minimise the base transit time τB for a given total Ge content. It is shown that a linear increase in Ge content from the base-emitter to the base-collector junction is required to minimise τB.