The Use of Metalorganics in the Preparation of Semiconductor Materials

• 1 January 1973
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 120  (1) , 135-137
• https://doi.org/10.1149/1.2403386

Abstract

Keywords

• MOCVD
• III-V SEMICONDUCTORS
• SEMICONDUCTOR THIN FILMS
• ORGANOMETALLIC COMPOUNDS
• CRYSTAL MICROSTRUCTURE
• ELECTRIC PROPERTIES
• SURFACE STRUCTURE
• ENERGY GAP
• CRYSTAL GROWTH
• HETEROEPITAXY
• FILMS
• INSULATING SUBSTRATES
• CHEMICAL VAPOR DEPOSITION