Etching of aluminum alloys in the transformer-coupled plasma etcher

• 1 July 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 12  (4) , 1328-1333
• https://doi.org/10.1116/1.579316

Abstract

Keywords

• TRANSFORMER COUPLED
• ALUMINUM ALLOYS
• PLASMA ETCHER
• ETCHING OF ALUMINUM