Inexpensive dc sputtering system for scanning electron microscopy
- 1 October 1975
- journal article
- letter
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 46 (10) , 1421-1422
- https://doi.org/10.1063/1.1134079
Abstract
A simple, easy to construct dc gold sputtering system suitable for coating nonconducting scanning electron microscope (SEM) samples is described. Gold foil is used for the target cathode and air for the ionizing gas. Components are readily available and can be assembled in less than a day.Keywords
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