Temperature dependence of ion beam mixing in GaAs, AlAs, and GaAs/AlAs/GaAs
- 16 August 1993
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 63 (7) , 976-978
- https://doi.org/10.1063/1.109863
Abstract
Ion beam mixing of AlAs markers in GaAs and GaAs markers in AlAs has been measured as a function of irradiation temperature with 1 MeV Kr ions. The mixing parameter in the GaAs matrix was ≊140 Å5/eV at temperatures between 110 and 473 K, but dropped to ≊120 Å5/eV at 573 K. The value was smaller in the AlAs matrix, ≊90 Å5/eV between 110 and 473 K, but it increased to ≊120 Å5/eV between 473 and 625 K. Ion beam mixing in a trilayer sample, GaAs/AlAs/GaAs, was also measured for comparison. At the deeper interface, AlAs on GaAs, and low temperature, the mixing parameter was 440 Å5/eV, but only 250 Å5/eV at the other interface, GaAs on AlAs. Mixing at the lower interface decreased at 573 K to 160 Å5/eV while it decreased at 473 K at the other interface to 110 Å5/eV. These results are interpreted on the basis of the influence of crystal structure on ion beam mixing.Keywords
This publication has 17 references indexed in Scilit:
- Interactions of energetic particles and clusters with solidsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
- Computer simulation of cascade damage in metalsJournal of Nuclear Materials, 1991
- Energy transfer between electrons and ions in collision cascades in solidsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
- Temperature dependence of compositional disordering of GaAs-AlAs superlattices during MeV Kr irradiationPhysical Review B, 1990
- Compositional disordering of GaAs/AlGaAs multiple quantum wells using ion bombardment at elevated temperaturesApplied Physics Letters, 1988
- Metalorganic chemical vapor depositionCritical Reviews in Solid State and Materials Sciences, 1988
- Low-temperature ion-beam mixing in metalsPhysical Review B, 1988
- Ion beam mixing: Basic experimentsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- When is thermodynamics relevant to ion-induced atomic rearrangements in metals?Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Ion mixing and recoil implantation simulations by means of tridynNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985