The influence of radio frequency sputter variables on the composition of YBa2Cu3O7 films
- 1 January 1990
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 8 (1) , 1-6
- https://doi.org/10.1116/1.577065
Abstract
The compositions and thicknesses of Y–Ba–Cu–O films radio frequency (rf) sputtered from a nonstoichiometric oxide target were determined as a function of deposition conditions. Variations in chamber pressure, rf power, and substrate position were observed to shift the as‐deposited cation composition along a single line in the Y–Ba–Cu ternary composition diagram. Deposition rates of up to 24 nm/min were achieved with good cation stoichiometry. Filmsdeposited on YSZ substrates at the optimized sputter conditions produced a zero resistance transition temperature of 88.7 K after a post deposition helium/oxygen heat treatment.Scanning electron microscopy(SEM) and x‐ray examination of the films revealed a strongly oriented large‐grain polycrystalline microstructure.Keywords
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