Structure of nickel silicide on Si(001): An atomic view

• 1 May 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (3) , 2094-2096
• https://doi.org/10.1116/1.587713

Abstract

Keywords

• STRUCTURE OF NICKEL
• NICKEL SILICIDE
• ATOMIC VIEW
• SILICIDE ON SI