Low temperature fabrication of poly-Si TFT by laser induced crystallization of a-Si

This publication has 2 references indexed in Scilit:

• High-performance thin-film transistors in low-temperature crystallized LPCVD amorphous silicon films
  IEEE Electron Device Letters, 1987
• Solid-phase growth of large aligned grains during scanned laser crystallization of amorphous Ge films on fused silica
  Applied Physics Letters, 1980