A New Type Edge Effect in High Resolution Scanning Electron Microscopy

• 1 April 1974
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 13  (4) , 583-586
• https://doi.org/10.1143/jjap.13.583

Abstract

Keywords

• HIGH RESOLUTION
• EDGE EFFECT
• NEW TYPE
• LINE CARD
• TYPE EDGE
• CLEARANCE SYSTEM
• RESOLUTION SCANNING
• CARD CLEARANCE
• MICROSCOPY SECURE