Hydrogen Passivation of HF ‐ Last Cleaned (100) Silicon Surfaces Investigated by Multiple Internal Reflection Infrared Spectroscopy
- 1 November 1994
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 141 (11) , 3128-3136
- https://doi.org/10.1149/1.2059288
Abstract
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