The effect of laser reflow on the variation of stress with thermal cycling in aluminum thin films
- 1 July 1991
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 9 (4) , 2536-2542
- https://doi.org/10.1116/1.577269
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: