Analysis of Solvent Redistribution during Vapor Deposition of Alloy Films from a Molten Source

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Abstract
Composition variations occurring in vapor-deposited alloy films have been quantitatively evaluated by treating the vapor deposition process as a solidification process. A mathematical model appropriate for solute redistribution during the solidification of a binary alloy was used to explain and predict compositional variations in vapor-deposited Ni–Fe films. Predictions based on such a model agree with recent experimental measurements during the final 50% of film formation. In earlier stages of vapor deposition, predicted film composition exceeds measured composition by approximately 3%.

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