Titanium sputter deposition at low pressures and long throw distances
- 1 January 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Semiconductor Manufacturing
- Vol. 9 (1) , 122-127
- https://doi.org/10.1109/66.484292
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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