Micromachined AlGaAs/GaAs vertical cavity filterwithadjustable temperature dependence and wavelength trimming ability
- 6 January 2000
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 36 (1) , 74-76
- https://doi.org/10.1049/el:20000123
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Vertical and Smooth Etching of InP by Cl2/Xe Inductively Coupled PlasmaJapanese Journal of Applied Physics, 1999
- Wavelength trimming by photoabsorption-included disordering for multiple-wavelength distributed-feedback laser arraysIEEE Photonics Technology Letters, 1997
- Vertical coupled-cavity microinterferometer on GaAs with deformable-membrane top mirrorIEEE Photonics Technology Letters, 1995
- GaAs micromachined widely tunable Fabry-Perot filtersElectronics Letters, 1995