Kinetics of Decomposition of Silane (Diluted in Argon) in a Low Pressure Glow Discharge
- 1 August 1975
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 122 (8) , 1030-1034
- https://doi.org/10.1149/1.2134390
Abstract
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