Low-temperature preparation of polycrystalline silicon from silicon tetrachloride
- 30 September 1982
- journal article
- Published by Elsevier in Materials Letters
- Vol. 1 (2) , 64-66
- https://doi.org/10.1016/0167-577x(82)90008-8
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit: