OYSTER, a three-dimensional structural simulator for microelectromechanical design
- 1 November 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 20 (1-2) , 179-185
- https://doi.org/10.1016/0250-6874(89)87116-1
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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- Models for computer simulation of complete IC fabrication processIEEE Transactions on Electron Devices, 1979