Surface profile measurements — a survey of applications in the area of vacuum deposition

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Abstract
A brief discussion of stylus profile measurement techniques is presented followed by illustrations of the application of stylus methods to film deposition measurement problems. Suggestions are presented for reducing errors and improving measurement accuracy. The effect of stylus shape and size on profile resolution is discussed, as well as deformation of specimen films due to stylus contact. Results of measurements of films in the 100-Å range are presented. Among the variety of applications of profile measurements illustrated are substrate flatness and texture, pattern registration, penumbra evaluation, and specially contoured films such as vacuum deposited lenticulars. Several of the illustrated profiles are correlated with scanning electron micrographs.

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