Preparation of NdBa2Cu3O7−δ films in ultrahigh vacuum with a NO2 supersonic molecular beam
- 24 December 1990
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 57 (26) , 2850-2852
- https://doi.org/10.1063/1.104200
Abstract
Superconducting NdBa2Cu3O7−δ thin films have been prepared in ultrahigh vacuum by the molecular beam epitaxy (MBE) method using a supersonic molecular beam of nitrogen dioxide as an oxidizing agent. A new type of supersonic molecular beam source has been developed, which has a liquid nitrogen trap for cryogenic pumping and is small enough in size to be installed in a conventional MBE system. Films with a transition temperature of about 30 K have been obtained in situ without post‐deposition annealing. Throughout deposition epitaxial growth of the films was observed in situ by reflection high‐energy electron diffraction.Keywords
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